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Low frictional property of thin films optimized by combinatorial sputter coating system
The Third Japan - U.S. Workshop on Combinatorial Materials Scien. December 08, 2004-December 10, 2004. Invited
NIMS author(s)
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Created at: 2017-02-25 00:47:17 +0900Updated at: 2024-03-05 11:40:22 +0900