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HfSiON膜中におけるSi-N結合の形成と結晶化抑制のメカニズム
(Mechanism for suppression of crystallization by Si-N bond formation in HfSiON)
2006年秋季第６７回応用物理学会学術講演会. 2006. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:23:05 +0900Updated at: 2024-03-05 11:41:11 +0900