Influence of reacting nitrogen gas consistence on the properties of TiN films prepared by r.f. magnetron sputtering
ICSFS(12th International Conference on Solid Films and Surfaces). 2004.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-14 10:56:24 +0900更新時刻: 2017-07-10 18:59:26 +0900