HOME > 口頭発表 > 書誌詳細Influence of reacting nitrogen gas consistence on the properties of TiN films prepared by r.f. magnetron sputteringYuriy PIHOSH, GOTO, Masahiro, KASAHARA, Akira, OOISHI, TETSUO, TOSA, Masahiro. ICSFS(12th International Conference on Solid Films and Surfaces). 2004.NIMS著者後藤 真宏笠原 章土佐 正弘Materials Data Repository (MDR)上の本文・データセット作成時刻 :2017-02-14 10:56:24 +0900 更新時刻 :2017-07-10 18:59:26 +0900