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レーザ支援プラズマCVD法によるsp3結合性5H-BN薄膜の光励起成長機構
(Photochemical growth mechanism of sp3-bonded 5H-BN films by laser-assisted plasma CVD)
第66回応用物理学会学術講演会. 2005-09-07-2005-09-11.
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Created at: 2017-01-08 04:43:04 +0900Updated at: 2017-07-10 19:25:11 +0900