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Combinatorial characterizationof metal gate /high-k oxide interface
Electric Materials Conference. June 22, 2005-June 24, 2005.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2019-03-04 09:37:25 +0900 Updated at: 2019-03-04 09:37:25 +0900