HOME > Presentation > Detail
Exotic effects of hydrogen termination during silicon epitaxial growth
(シリコン・エピタキシャル成長における水素終端の特異な効果)
第２４回 半導体物理国際会議. 1998-08-03.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:52:05 +0900 Updated at: 2017-07-10 17:49:57 +0900