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AuthorTERAJI, Tokuyuki, WATANABE, Kenji.
Title酸素添加条件で成長したホモエピタキシャルダイヤモンド薄膜の欠陥評価
(Defect characterization of homoepitaxial diamond films grown with oxygen addition)
Event name第30回ダイヤモンドシンポジウム
Year of publication2016
LanguageJapanese

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