HOME > Presentation > DetailHigh temperature in situ AFM/STM observation of decomposition and cleaning process of ultrathin SiO2 films on Si(111) surfaces iFUJITA, Daisuke, KUMAKURA, Tsuyako, ONISHI, Keiko, SAGISAKA, Keisuke. 18th International Vacuum Congress. 2010.NIMS author(s)FUJITA, DaisukeONISHI, KeikoSAGISAKA, KeisukeFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 04:31:29 +0900Updated at: 2017-07-10 20:52:56 +0900