HOME > 口頭発表 > 書誌詳細Internal stress and polarity control of GaN film by low impurity GaN targetYuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, SANG, Liwen, NAGATA, Takahiro, CHIKYO, Toyohiro. International Workshop on Nitride Semiconductors. 2022.NIMS著者サン リウエン長田 貴弘知京 豊裕Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-12-08 06:16:33 +0900更新時刻: 2022-12-08 06:16:33 +0900