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Focused Ion Beam Imaging of Defects in Si Materials for Photovoltaic and Semiconductor Use
(集束イオンビーム法による太陽電池用シリコンの欠陥の可視化)
Defects Recognition, Imaging and Physics in Semiconductors. 2013.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:17:25 +0900Updated at: 2017-07-10 21:41:29 +0900