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AuthorKUMAR Ashutosh, UZUHASHI Jun, TANAKA Ryo, TAKASHIMA Shinya, OHKUBO Tadakatsu, HONO Kazuhiro, EDO Masaharu.
TitleAn atom probe tomographic investigation of Mg distribution in Mg-implanted GaN layers on free standing GaN substrates
Event nameInternational Workshop on Nitride Semiconductors (IWN 2018)
Year of publication2018
LanguageEnglish
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