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An atom probe tomographic investigation of Mg distribution in Mg-implanted GaN layers on free standing GaN substrates

KUMAR, Ashutosh, UZUHASHI, Jun, TANAKA Ryo, TAKASHIMA Shinya, HONO, Kazuhiro, OHKUBO, Tadakatsu, EDO Masaharu.
International Workshop on Nitride Semiconductors (IWN 2018). 2018.

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    Created at: 2019-03-04 09:37:05 +0900Updated at: 2019-03-04 09:37:05 +0900

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