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STEM/3DAPによるMg注入GaN層のナノ組織解析
(Nanostructural characterization of Mg implanted GaN layers by STEM and 3DAP)

2020年第67回応用物理学会春季学術講演会. 2020. Invited

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2020-08-04 03:00:19 +0900Updated at: 2024-03-05 12:21:21 +0900

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