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TiN sputter coating for decrease in sliding friction in a vacuum
(真空中の摺動摩擦低減のためのTiNスパッタ膜)
International Symposium on Materials processing for Nanostructur. September 16, 2001-September 19, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:09:25 +0900 Updated at: 2022-09-05 11:09:25 +0900