HOME > Presentation > DetailCombinatorial Sputter Coating System for Advanced Low Friction CoatingsGOTO, Masahiro, KASAHARA, Akira, TOSA, Masahiro. 6th Combi workshop. October 27, 2010-October 29, 2010. InvitedNIMS author(s)GOTO, MasahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-26 20:04:33 +0900 Updated at: 2024-03-05 11:43:05 +0900