Elimination of Threading Dislocations in α-Ga2O3 by Double-layered Epitaxial Lateral Overgrowth
(二重ELOによるα-Ga2O3の貫通転位低減)
2020 International Conference on Solid State Devices and Materials (SSDM2020). 2020.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2020-10-02 03:00:19 +0900更新時刻: 2020-10-02 03:00:19 +0900