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Elimination of Threading Dislocations in α-Ga2O3 by Double-layered Epitaxial Lateral Overgrowth
(二重ELOによるα-Ga2O3の貫通転位低減)
2020 International Conference on Solid State Devices and Materials (SSDM2020). September 27, 2020-September 30, 2020.
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Created at: 2020-10-02 03:00:19 +0900 Updated at: 2020-10-02 03:00:19 +0900