HOME > Presentation > DetailFrictional properties of TiN films prepared by combinatorial sputter coatingYuriy PIHOSH, GOTO, Masahiro, KASAHARA, Akira, TOSA, Masahiro. 第45回真空に関する連合講演会. October 27, 2004-October 29, 2004.NIMS author(s)GOTO, MasahiroKASAHARA, AkiraTOSA, MasahiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 05:17:31 +0900Updated at: 2017-07-10 19:08:54 +0900