Effect of low temperature buffer layer on the all-sputtered epitaxial GaN/AlN film on Si (111) substrate

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NAGATA, Takahiro, Yuya Suemoto, Yoshihiro Ueoka, Masami Mesuda, SANG, Liwen, CHIKYO, Toyohiro.

33rd International Microprocesses and Nanotechnology Conference (MNC2020). 2020年11月09日-2020年11月12日.

作成時刻: 2020-12-10 03:00:21 +0900 更新時刻: 2020-12-10 03:00:21 +0900