Effect of low temperature buffer layer on the all-sputtered epitaxial GaN/AlN film on Si (111) substrate
33rd International Microprocesses and Nanotechnology Conference (MNC2020). 2020.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2020-12-10 03:00:21 +0900更新時刻: 2020-12-10 03:00:21 +0900