(Stress control on Si surface with ultraviolet light irradiation to plasma polymerized film)
International Symposium on Surface Science and Nanotechnology. 2005.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-14 11:04:05 +0900更新時刻: 2018-05-30 19:35:02 +0900