HOME > Presentation > Detail(Stress control on Si surface with ultraviolet light irradiation to plasma polymerized film)五十嵐 慎一, 板倉 明子, 戸田 雅也, 北島 正弘, L. Chu, A.N. Chifen, R. Forch, R. Berger. International Symposium on Surface Science and Nanotechnology. November 14, 2005-November 17, 2005.NIMS author(s)ITAKURA, AkikoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-02-14 11:04:05 +0900Updated at: 2018-05-30 19:35:02 +0900