(Stress control on Si surface with ultraviolet light irradiation to plasma polymerized allylamine film)
ICTF13/ACSIN8. 2005.
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Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-25 00:55:09 +0900更新時刻: 2018-05-30 19:30:40 +0900