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AuthorIGARASHI, Shinichi, ITAKURA, Akiko, KITAJIMA, Masahiro, L.Chu, A.N.Chifen, R. Foerch, R. Berger.
TitleStress control on Si surface with ultraviolet light irradiation to plasma polymerized allylamine film
Event nameICTF13/ACSIN8
Year of publication2005
LanguageEnglish
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