HOME > Presentation > Detailプラズマ照射を施したMBE成長ScN薄膜の電気特性(Electric properties of plasma irradiated ScN films grown by MBE method)大垣 武, 坂口 勲, 大橋 直樹. 日本セラミックス協会 2020年年会. March 18, 2020-March 20, 2020.NIMS author(s)OGAKI, TakeshiSAKAGUCHI, IsaoOHASHI, NaokiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2020-03-25 03:00:22 +0900 Updated at: 2020-03-25 03:00:22 +0900