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プラズマ照射を施したMBE成長ScN薄膜の電気特性
(Electric properties of plasma irradiated ScN films grown by MBE method)

日本セラミックス協会 2020年年会. 2020.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2020-03-25 03:00:22 +0900Updated at: 2020-03-25 03:00:22 +0900

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