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Demonstration of ferroelectricity in non-substituted AlN thin films fabricated by sputtering method

長谷川 浩太, SHIMIZU, Takao, OHSAWA, Takeo, SAKAGUCHI, Isao, OHASHI, Naoki.
MNC2023. November 14, 2023-November 17, 2023.

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Fulltext and dataset(s) on Materials Data Repository (MDR)

    Created at: 2024-01-09 03:10:21 +0900 Updated at: 2024-01-09 03:10:21 +0900

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