SAMURAI - NIMS Researchers Database

HOME > 口頭発表 > 書誌詳細

Characteristics of oxide TFT using atomic-layer deposited InOx-based metal oxide channel

2023 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors. 2023-05-14. 招待講演

NIMS著者


Materials Data Repository (MDR)上の本文・データセット


    作成時刻: 2023-06-09 09:58:03 +0900更新時刻: 2024-01-09 03:08:54 +0900

    ▲ページトップへ移動