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Optimized high-speed CW Laser Annealing for High and Dopant Activation and Mobility in Sb-Doped Ge Films on Quartz
SSDM 2025 (International Conference on Solid State Devices and Materials). September 15, 2025-September 18, 2025.
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Created at: 2025-11-11 03:10:38 +0900 Updated at: 2025-11-11 03:10:38 +0900