Multistep inorganic synthesis with atomic layer deposition to fabricate 3-dimensional THz phononic structure
MNC2021 (Micro Nano Conference). 2021.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2022-01-27 03:01:17 +0900更新時刻: 2022-01-27 03:01:17 +0900