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Multistep inorganic synthesis with atomic layer deposition to fabricate 3-dimensional THz phononic structure
MNC2021 (Micro Nano Conference). October 26, 2021-October 29, 2021.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-01-27 03:01:17 +0900Updated at: 2022-01-27 03:01:17 +0900