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レーザ基板加熱MOCVD法によるZnO薄膜の作製
(ZnO film growth by MOCVD equipped with laser heating system)

Author(s)Eiji Fujimoto, SUMIYA, Masatomo, Mikk Lippmaa, Tsuyoshi Ohnishi, Hideomi Koinuma.
Event name2006年秋季 第67回応用物理学会学術講演会
Year of publication2006
LanguageJapanese

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