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ALD成長In2O3薄膜のSe化
(Selenization of ALD-grown In2O3 thin films)
2018年 第79回応用物理学会秋季学術講演会. 2018.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2018-06-28 16:44:27 +0900Updated at: 2018-06-28 16:44:27 +0900