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(-102)β-Ga2O3基板上のホモ・ヘテロエピタキシとプラズマフリー微細加工
(Homo- and hetero-epitaxial growth and plasma-free microfabrication on (-102) β-Ga2O3 substrates)
第53回結晶成長国内会議（JCCG-53）. November 18, 2024-November 20, 2024. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2024-11-29 03:18:04 +0900 Updated at: 2024-11-29 03:18:04 +0900