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Study of the dependence of GaN surface oxidation on the crystalline plane by in-situ XPS during O2 molecular beam irradiation

著者ASAI, Yuya, 吉越章隆, 隅田真人, 上殿 明良, SUMIYA, Masatomo.
会議名International workshop on nitride semiconductors 2018
発表年2018
言語English

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