Plasma-enhanced atomic layer deposition of zinc oxide thin films using a liquid cyclopentadienyl-based precursor and oxygen plasma
MNC 2022, 35th International Microprocesses and Nanotechnology Conference. 2022.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2023-02-24 17:19:40 +0900更新時刻: 2023-02-24 17:19:40 +0900