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Plasma-enhanced atomic layer deposition of zinc oxide thin films using a liquid cyclopentadienyl-based precursor and oxygen plasma
MNC 2022, 35th International Microprocesses and Nanotechnology Conference. November 08, 2022-November 11, 2022.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2023-02-24 17:19:40 +0900Updated at: 2023-02-24 17:19:40 +0900