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放射光軟X線顕微光電子分光法によるAlxGa1-xN系薄膜の非破壊電子状態分析
(Non-destructive spectral analysis of AlxGa1-xN films by synchrotron soft X-ray photoelectron spectromicriscopy)

竹澤 伸吾, 小濱 路生, 張 文雄, 吹留 博一, 渡邊 一世, 井村 将隆, 津田 俊輔, 小嗣 真人, 永村 直佳.
NIMS先端計測シンポジウム2022 https://www.nims.go.jp/research/materials-analysis/events/amcp_sympo2022.html. 2022.

NIMS author(s)


Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at :2022-06-21 03:14:38 +0900 Updated at :2022-06-21 03:14:38 +0900

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