HOME > Published patent applications > Detail[Published patent application] sp3-結合性BN高密度相を有するBN薄膜およびその製造方法。2009-11-05. 2009256766 (Google Patents) , 5218969NIMS author(s)NAGATA, TakahiroCHIKYO, ToyohiroCreated at :2023-07-22 21:45:23 +0900 Updated at :2023-07-22 21:45:23 +0900