HOME > Published patent applications > Detail[Published patent application] 窒化ガリウム等のⅢ族窒化物の成膜方法2007-02-15. 200709281 (Google Patents) WO2007018121 (Google Patents) TW200709281 (Google Patents) NIMS author(s)CHIKYO, ToyohiroNAGATA, TakahiroCreated at :2023-07-22 21:45:15 +0900 Updated at :2023-07-22 21:45:15 +0900
