HOME > Published patent applications > Detail[Published patent application] 誘電体膜およびそれを用いたキャパシタならびに誘電体膜の製造方法2020-12-10. WO2020246363 (Google Patents) NIMS author(s)CHIKYO, ToyohiroNAGATA, TakahiroCreated at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900
