HOME > Published patent applications > Detail[Published patent application] マイクロホールを有している金属薄膜の形成方法2001-07-17. 2001192858 (Google Patents) , 3265363NIMS author(s)KOIZUMI, SatoshiTERAJI, TokuyukiCreated at :2023-07-22 21:44:42 +0900 Updated at :2023-07-22 21:44:42 +0900