HOME > その他の文献 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Used for Nanocrystalline Diamond DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, MATSUMOTO, Seiichiro. Proceedings of Inter. COE Forum Plasma Sci. Technol. 159-160. 2004.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 11:36:41 +0900 更新時刻: 2022-09-05 11:36:41 +0900
