コンビナトリアルイオン注入を用いた化学センサ修飾
(Modification of chemical sensor using a combinatorial ion implantation method)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 12:09:30 +0900Updated at: 2022-09-05 12:09:30 +0900