HOME > その他の文献 > 書誌詳細Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond DepositionOKADA, Katsuyuki, KOMATSU, Shojiro, ISHIGAKI, Takamasa. Proceedings of ISPC-17 1-5. 2005.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 11:47:31 +0900 更新時刻: 2022-09-05 11:47:31 +0900
