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Numerical Simulation of Low Pressure Inductively Coupled Plasma Sources for Nanocrystalline Diamond Deposition

OKADA, Katsuyuki, KOMATSU, Shojiro, ISHIGAKI, Takamasa.

Proceedings of ISPC-17 1-5. 2005.

NIMS author(s)

OKADA, Katsuyuki

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 11:47:31 +0900 Updated at: 2022-09-05 11:47:31 +0900

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