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AuthorSHIMOJO, Masayuki, MITSUISHI, Kazutaka, TAKEGUCHI, Masaki, TANAKA, Miyoko, FURUYA, Kazuo.
TitleNanofabrication using electron beam-induced deposition techniques
(Nanofabrication using electron beam-induced deposition techniques) Encyclopedia of Nanoscience and Nanotechnology
Publisher name
Year of publication2011
LanguageEnglish
ISBN

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