HOME > Books > DetailNanofabrication using electron beam-induced deposition techniquesSHIMOJO, Masayuki, MITSUISHI, Kazutaka, TAKEGUCHI, Masaki, TANAKA, Miyoko, FURUYA, Kazuo. Encyclopedia of Nanoscience and Nanotechnology 209-230. 2011.NIMS author(s)MITSUISHI, KazutakaTAKEGUCHI, MasakiTANAKA, MiyokoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-01-08 03:17:58 +0900Updated at: 2017-04-06 22:15:01 +0900