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Defect Characterization in Silicon by Electron-Beam-Induced Current and Cathodoluminescence Techniques

SEKIGUCHI, Takashi, CHEN, Jun.

Defects and Impurities in Silicon Materials: An Introduction to Atomic-Level Silicon Engineering 343-373. 2016.

NIMS author(s)

CHEN, Jun

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2017-11-23 21:10:35 +0900 Updated at: 2018-05-30 20:16:20 +0900

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