Li-Si融液中における(0001)4H&#8211;SiC基板上への2H-SiCのLPE成長

Mamoru Imade; Takashi Ogura; Masahiro Uemura; Fumio Kawamura; Masashi Yoshimura; Yasuo Kitaoka; Takatomo Sasaki; Yusuke Mori; Masanobu Yamazaki; Shigekazu Suwabe; Shin-ichi Nakashima; Mamoru Imade; Takashi Ogura; Masahiro Uemura; Fumio Kawamura; Masashi Yoshimura; Yasuo Kitaoka; Takatomo Sasaki; Yusuke Mori; Masanobu Yamazaki; Shigekazu Suwabe; Shin-ichi Nakashima

doi:10.1016/j.matlet.2008.12.009

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Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt
(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)

Mamoru Imade, Takashi Ogura, Masahiro Uemura, Fumio Kawamura, Masashi Yoshimura, Yasuo Kitaoka, Takatomo Sasaki, Yusuke Mori, Masanobu Yamazaki, Shigekazu Suwabe, Shin-ichi Nakashima.

Materials Letters 63 [8] 649-651. 2009.

https://doi.org/10.1016/j.matlet.2008.12.009

NIMS著者

川村史朗

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 16:00:21 +0900 更新時刻: 2025-04-14 04:38:04 +0900

Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt
(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)