Liquid-phase epitaxy of 2H&#8211;SiC film on a (0001) 4H&#8211;SiC substrate in Li&#8211;Si melt

Mamoru Imade; Takashi Ogura; Masahiro Uemura; Fumio Kawamura; Masashi Yoshimura; Yasuo Kitaoka; Takatomo Sasaki; Yusuke Mori; Masanobu Yamazaki; Shigekazu Suwabe; Shin-ichi Nakashima; Mamoru Imade; Takashi Ogura; Masahiro Uemura; Fumio Kawamura; Masashi Yoshimura; Yasuo Kitaoka; Takatomo Sasaki; Yusuke Mori; Masanobu Yamazaki; Shigekazu Suwabe; Shin-ichi Nakashima

doi:10.1016/j.matlet.2008.12.009

Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt
(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)

Mamoru Imade, Takashi Ogura, Masahiro Uemura, Fumio Kawamura, Masashi Yoshimura, Yasuo Kitaoka, Takatomo Sasaki, Yusuke Mori, Masanobu Yamazaki, Shigekazu Suwabe, Shin-ichi Nakashima.

Materials Letters 63 [8] 649-651. 2009.

https://doi.org/10.1016/j.matlet.2008.12.009

NIMS author(s)

KAWAMURA, Fumio

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 16:00:21 +0900Updated at: 2024-04-01 19:43:11 +0900

Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Liquid-phase epitaxy of 2H–SiC film on a (0001) 4H–SiC substrate in Li–Si melt
(Li-Si融液中における(0001)4H–SiC基板上への2H-SiCのLPE成長)