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Sputtering rate measurements of some transition metal silicides and comparison with those of the elements

Michiko Yoshitake, Yasuhiro Yamauchi, Chandra Bose.
Surface and Interface Analysis 36 [8] 801-804. 2004.

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    作成時刻 :2016-05-24 14:32:53 +0900 更新時刻 :2018-12-19 02:26:38 +0900

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