HOME > 論文 > 書誌詳細Sputtering rate measurements of some transition metal silicides and comparison with those of the elementsMichiko Yoshitake, Yasuhiro Yamauchi, Chandra Bose. Surface and Interface Analysis 36 [8] 801-804. 2004.https://doi.org/10.1002/sia.1768 NIMS著者吉武 道子Materials Data Repository (MDR)上の本文・データセット作成時刻 :2016-05-24 14:32:53 +0900 更新時刻 :2018-12-19 02:26:38 +0900